Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Material type:
TextPublication details: Washington, D.C. : National Academy Press, 1992.Description: 1 online resource (xii, 89 pages) : illustrationsContent type: - text
- computer
- online resource
- 0585149453
- 9780585149455
- Microelectronics industry
- Molecular beams -- Industrial applications
- Microelectronics -- Materials
- Plasma-enhanced chemical vapor deposition -- Industrial applications
- TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics
- TECHNOLOGY & ENGINEERING -- Electronics -- Digital
- Microelectronics industry
- Microelectronics -- Materials
- Molecular beams -- Industrial applications
- Plasma-enhanced chemical vapor deposition -- Industrial applications
- Microelectronics Materials
- Microelectronics industry
- Molecular Industrial applications
- Plasma-enhanced Industrial applications
- 621.381 20
- TK7836 .N37 1992eb
- digitized 2010 committed to preserve
"NMAB-461."
Includes bibliographical references.
Print version record.
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http://purl.oclc.org/DLF/benchrepro0212
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