Beam technologies for integrated processing : (Record no. 36362)
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| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20200810100955.0 |
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| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
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| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 000807s1992 dcua ob 000 0 eng d |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 92060205 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | N$T |
| Language of cataloging | eng |
| Description conventions | pn |
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| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0585149453 |
| Qualifying information | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780585149455 |
| Qualifying information | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 0309046351 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 9780309046350 |
| Qualifying information | (print) |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) | |
| OCLC library identifier | AU@ |
| System control number | 000050895136 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) | |
| OCLC library identifier | AU@ |
| System control number | 000051596346 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) | |
| OCLC library identifier | DEBBG |
| System control number | BV043061822 |
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| OCLC library identifier | DEBSZ |
| System control number | 422560960 |
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| OCLC library identifier | GBVCP |
| System control number | 800659287 |
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| OCLC library identifier | NZ1 |
| System control number | 11927460 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) | |
| OCLC library identifier | NZ1 |
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| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (OCoLC)44965115 |
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| -- | (OCoLC)1157954437 |
| 042 ## - AUTHENTICATION CODE | |
| Authentication code | dlr |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7836 |
| Item number | .N37 1992eb |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | TEC |
| Subject category code subdivision | 008070 |
| Source | bisacsh |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | TEC |
| Subject category code subdivision | 008060 |
| Source | bisacsh |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| Edition number | 20 |
| 088 ## - REPORT NUMBER | |
| Report number | NMAB 461 |
| 049 ## - LOCAL HOLDINGS (OCLC) | |
| Holding library | MAIN |
| 110 2# - MAIN ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | National Research Council (U.S.). |
| Subordinate unit | Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems. |
| Authority record control number or standard number | http://id.loc.gov/authorities/names/n92090104 |
| 245 10 - TITLE STATEMENT | |
| Title | Beam technologies for integrated processing : |
| Remainder of title | report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Washington, D.C. : |
| Name of publisher, distributor, etc. | National Academy Press, |
| Date of publication, distribution, etc. | 1992. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 online resource (xii, 89 pages) : |
| Other physical details | illustrations |
| 336 ## - CONTENT TYPE | |
| Content type term | text |
| Content type code | txt |
| Source | rdacontent |
| 337 ## - MEDIA TYPE | |
| Media type term | computer |
| Media type code | c |
| Source | rdamedia |
| 338 ## - CARRIER TYPE | |
| Carrier type term | online resource |
| Carrier type code | cr |
| Source | rdacarrier |
| 347 ## - DIGITAL FILE CHARACTERISTICS | |
| File type | data file |
| Source | rda |
| 500 ## - GENERAL NOTE | |
| General note | "NMAB-461." |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references. |
| 588 0# - SOURCE OF DESCRIPTION NOTE | |
| Source of description note | Print version record. |
| 506 ## - RESTRICTIONS ON ACCESS NOTE | |
| Materials specified | Use copy |
| Standardized terminology for access restriction | Restrictions unspecified |
| Source of term | star |
| Institution to which field applies | MiAaHDL |
| 533 ## - REPRODUCTION NOTE | |
| Type of reproduction | Electronic reproduction. |
| Place of reproduction | [S.l.] : |
| Agency responsible for reproduction | HathiTrust Digital Library, |
| Date of reproduction | 2010. |
| Institution to which field applies | MiAaHDL |
| 538 ## - SYSTEM DETAILS NOTE | |
| System details note | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| Uniform Resource Identifier | <a href="http://purl.oclc.org/DLF/benchrepro0212">http://purl.oclc.org/DLF/benchrepro0212</a> |
| Institution to which field applies | MiAaHDL |
| 583 1# - ACTION NOTE | |
| Action | digitized |
| Time/date of action | 2010 |
| Jurisdiction | HathiTrust Digital Library |
| Status | committed to preserve |
| Source of term | pda |
| Institution to which field applies | MiAaHDL |
| 590 ## - LOCAL NOTE (RLIN) | |
| Local note | eBooks on EBSCOhost |
| Provenance (VM) [OBSOLETE] | EBSCO eBook Subscription Academic Collection - Worldwide |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics industry. |
| Authority record control number or standard number | http://id.loc.gov/authorities/subjects/sh85084825 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Molecular beams |
| General subdivision | Industrial applications. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics |
| General subdivision | Materials. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma-enhanced chemical vapor deposition |
| General subdivision | Industrial applications. |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | TECHNOLOGY & ENGINEERING |
| General subdivision | Electronics |
| -- | Microelectronics. |
| Source of heading or term | bisacsh |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | TECHNOLOGY & ENGINEERING |
| General subdivision | Electronics |
| -- | Digital. |
| Source of heading or term | bisacsh |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics industry. |
| Source of heading or term | fast |
| Authority record control number or standard number | (OCoLC)fst01019790 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics |
| General subdivision | Materials. |
| Source of heading or term | fast |
| Authority record control number or standard number | (OCoLC)fst01019771 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Molecular beams |
| General subdivision | Industrial applications. |
| Source of heading or term | fast |
| Authority record control number or standard number | (OCoLC)fst01024731 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma-enhanced chemical vapor deposition |
| General subdivision | Industrial applications. |
| Source of heading or term | fast |
| Authority record control number or standard number | (OCoLC)fst01066370 |
| 653 #0 - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Microelectronics |
| -- | Materials |
| 653 #0 - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Microelectronics industry |
| 653 #0 - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Molecular |
| -- | Industrial applications |
| 653 #0 - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Plasma-enhanced |
| -- | Industrial applications |
| 655 #0 - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Electronic book. |
| 655 #4 - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Electronic books. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Relationship information | Print version: |
| Main entry heading | National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems. |
| Title | Beam technologies for integrated processing. |
| Place, publisher, and date of publication | Washington, D.C. : National Academy Press, 1992 |
| International Standard Book Number | 0309046351 |
| Record control number | (DLC) 92060205 |
| -- | (OCoLC)26857491 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://libproxy.firstcity.edu.my:8443/login?url=http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14749">https://libproxy.firstcity.edu.my:8443/login?url=http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14749</a> |
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