The science and engineering of microelectronic fabrication / / Stephen A. Campbell.
Material type: TextSeries: Oxford series in electrical engineeringPublication details: New York : : Oxford University Press, 1996.Description: xv, 536 p. : : ill. ; ; 25 cmISBN:- 0195105087
- 621.3815/2 CAM 1996
- TK7871.85.C25 1996
Item type | Current library | Home library | Collection | Shelving location | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|---|---|
Open Collection | FIRST CITY UNIVERSITY COLLEGE | FIRST CITY UNIVERSITY COLLEGE | Open Collection | FCUC Library | 621.38152 CAM 1996 (Browse shelf(Opens below)) | Available | 00005789 | ||
Open Collection | FIRST CITY UNIVERSITY COLLEGE | FIRST CITY UNIVERSITY COLLEGE | Open Collection | FCUC Library | 621.38152 CAM 1996 (Browse shelf(Opens below)) | Available | 00005788 |
Total holds: 0
Includes bibliographical references and index.