Normal view MARC view ISBD view

The science and engineering of microelectronic fabrication /

Campbell, Stephen A., , 1954-

The science and engineering of microelectronic fabrication / / Stephen A. Campbell. - New York : : Oxford University Press, 1996. - xv, 536 p. : : ill. ; ; 25 cm. - Oxford series in electrical engineering. .

Includes bibliographical references and index.

ISBN: 0195105087

Subjects--Topical Terms:
Semiconductors--Design and construction.

LC Class. No.: TK7871.85.C25 1996

Dewey Class. No.: 621.3815/2 CAM 1996

Print
Add to your cart (remove)
Send to device
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)