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Lithography : (Record no. 42313)

MARC details
000 -LEADER
fixed length control field	06175cam a2200721 i 4500
001 - CONTROL NUMBER
control field	on1162225843
003 - CONTROL NUMBER IDENTIFIER
control field	OCoLC
005 - DATE AND TIME OF LATEST TRANSACTION
control field	20201015090430.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS
fixed length control field	m o d
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field	cr \|\|\|\|\|\|\|\|\|\|\|
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field	100820s2011 nyua ob 001 0 eng
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number	2020688404
040 ## - CATALOGING SOURCE
Original cataloging agency	DLC
Language of cataloging	eng
Description conventions	rda
Transcribing agency	DLC
Modifying agency	VLY
--	OCLCO
--	N$T
--	YDXCP
--	E7B
--	OCLCF
--	NLGGC
--	EBLCP
--	AZK
--	MERUC
--	MOR
--	PIFAG
--	ZCU
--	U3W
--	STF
--	WRM
--	VTS
--	COCUF
--	AGLDB
--	ICG
--	INT
--	NRAMU
--	VT2
--	WYU
--	DKC
--	AU@
--	UKCRE
019 ## -
--	726745731
--	923657261
--	961602926
--	962706360
--	988521739
--	991965015
--	1037915305
--	1038696795
--	1045526243
--	1066605485
--	1081287759
--	1153453550
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number	9781611221237
Qualifying information	ebook
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number	1611221234
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN	9781617618376
Qualifying information	hardcover
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN	1617618373
029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC)
OCLC library identifier	AU@
System control number	000051378948
029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC)
OCLC library identifier	DEBBG
System control number	BV043128383
029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC)
OCLC library identifier	DEBBG
System control number	BV044087417
029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC)
OCLC library identifier	DEBSZ
System control number	421601930
029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC)
OCLC library identifier	NZ1
System control number	15345521
035 ## - SYSTEM CONTROL NUMBER
System control number	(OCoLC)1162225843
Canceled/invalid control number	(OCoLC)726745731
--	(OCoLC)923657261
--	(OCoLC)961602926
--	(OCoLC)962706360
--	(OCoLC)988521739
--	(OCoLC)991965015
--	(OCoLC)1037915305
--	(OCoLC)1038696795
--	(OCoLC)1045526243
--	(OCoLC)1066605485
--	(OCoLC)1081287759
--	(OCoLC)1153453550
050 00 - LIBRARY OF CONGRESS CALL NUMBER
Classification number	TK7872.M3
072 #7 - SUBJECT CATEGORY CODE
Subject category code	TEC
Subject category code subdivision	008010
Source	bisacsh
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number	621.3815/31
Edition number	22
049 ## - LOCAL HOLDINGS (OCLC)
Holding library	MAIN
245 00 - TITLE STATEMENT
Title	Lithography :
Remainder of title	principles, processes and materials /
Statement of responsibility, etc.	Theodore C. Hennessy, editor.
264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE
Place of production, publication, distribution, manufacture	New York :
Name of producer, publisher, distributor, manufacturer	Nova Science,
Date of production, publication, distribution, manufacture, or copyright notice	c2011.
300 ## - PHYSICAL DESCRIPTION
Extent	1 online resource.
336 ## - CONTENT TYPE
Content type term	text
Content type code	txt
Source	rdacontent
337 ## - MEDIA TYPE
Media type term	computer
Media type code	c
Source	rdamedia
338 ## - CARRIER TYPE
Carrier type term	online resource
Carrier type code	cr
Source	rdacarrier
490 1# - SERIES STATEMENT
Series statement	Engineering tools, techniques and tables
490 1# - SERIES STATEMENT
Series statement	Nanotechnology science and technology
500 ## - GENERAL NOTE
General note	Includes bibliographical references and index.
588 ## - SOURCE OF DESCRIPTION NOTE
Source of description note	Description based on print version record.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note	""REFERENCES""""LITHOGRAPHY: PRINCIPLES,PROCESSES AND MATERIALS""; ""ABSTRACT""; ""1. INTRODUCTION""; ""2. PRINCIPLE OF LITHOGRAPHY""; ""3. PROCESSES OF LITHOGRAPHY""; ""3.1. RIE-NSL Lithography [32]""; ""3.2. FIB Lithography""; ""3.3. Laser Interference Lithography""; ""4. MATERIALS OF LITHOGRAPHY""; ""4.1. Materials of RIE-NSL Lithography""; ""4.2. Materials of FIB Lithography""; ""4.3. Materials of Laser Interference Lithography""; ""5. CONCLUSIONS""; ""REFERENCES""; ""LASER INTERFERENCE LITHOGRAPHY""; ""ABSTRACT""; ""1. INTRODUCTION""; ""2. THEORY""; ""3. INSTRUMENTATION""
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note	Includes bibliographical references and index.
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note	""LITHOGRAPHY:PRINCIPLES, PROCESSES AND MATERIALS""; ""CONTENTS""; ""PREFACE""; ""PRINCIPLE, PROCESSES AND MATERIALS FOR NANO IMPRINT LITHOGRAPHY""; ""1. INTRODUCTION""; ""2. PRINCIPLE AND FUNDAMENTAL PROCESS FOR NIL""; ""2.1. Principle of NIL""; ""2.2. Theoretical Analysis for NIL""; ""2.3. Fundamental Process for NIL""; ""3. VARIATIONS OF NIL PROCESSES""; ""3.1. Combined Thermal and UV-NIL""; ""3.2. Reverse Imprint Process""; ""3.3. Laser-Assisted Direct Imprint""; ""3.4. Roll Imprint Process""; ""3.5. Substrate Conformal Imprint Lithography (SCIL)""; ""3.6. Large Area Imprint""
505 8# - FORMATTED CONTENTS NOTE
Formatted contents note	""3.7. Nanoelectrode Lithography""""3.8. Hybrid NIL Process""; ""3.9. Metal Nanoparticle Nanoimprinting Process""; ""3.10. High Resolution NIL""; ""3.11. Other NIL Processes""; ""4. NIL MATERIALS""; ""4.1. NIL Resists""; ""4.2. Functional Materials and Other Imprintable Materials""; ""4.3. Mold Materials""; ""5. PROSPECTS AND CHALLENGES IN NIL""; ""6. CONCLUSION""; ""ACKNOWLEDGMENTS""; ""REFERENCES""; ""NANOFABRICATION IN ELECTRONBEAM LITHOGRAPHY""; ""1. ELECTRON BEAM LITHOGRAPHY OVERVIEW""; ""1.1. Introduction to the Electron Beam Lithography System""; ""1.2. Proximity Effect""
505 8# - FORMATTED CONTENTS NOTE
Formatted contents note	""1.3. Numerical Calculation of the E-beam (Monte Carlo Method)""""2. CARBON NANOTUBE (CNT) BASED DEVICES""; ""2.1.Introduction to carbon nanotubes ""; ""2.2. VACNT Based FE Device with Individual Cathode Structures""; ""2.3. Field Emission Properties of Single Vertically Aligned Carbon Nanotubes""; ""2. VARIO""; ""2.4. Application in Micro CNT Column System""; ""3. FABRICATION OF 3D NANOSTRUCTURES ON CYLINDRICAL ROLLERS""; ""3.1. Introduction to Nanolithography""; ""3.2. In-House Field Emission Measurement Facility""; ""4. CONCLUSIONS""; ""ACKNOWLEDGMENT""; ""REFERENCES""
505 8# - FORMATTED CONTENTS NOTE
Formatted contents note	""GENERATION OF MICRO PATTERNS ONSIDE SURFACES OF POLYMER AND SISUBSTRATES USING A MICROPUNCHING LITHOGRAPHY APPROACH""""ABSTRACT""; ""1. INTRODUCTION""; ""2. MACROPUNCHING METHOD AND MPL""; ""3. AU SIDEWALL PATTERNS ON HDPE CHANNELS""; ""3.1. Fabrication Procedure""; ""3.2. Experimental Results and Discussions""; ""4. SUPER HYDROPHOBIC PDMS CHANNELS""; ""4.1. Fabrication Process""; ""4.2. Experimental Results and Discussions""; ""5. FABRICATION OF AU DOTS ON SI SIDEWALLS""; ""5.1. Fabrication Procedures""; ""5.2. Results and Discussions""; ""6. SUMMARY AND CONCLUSIONS""; ""ACKNOWLEDGMENTS""
546 ## - LANGUAGE NOTE
Language note	English.
590 ## - LOCAL NOTE (RLIN)
Local note	eBooks on EBSCOhost
Provenance (VM) [OBSOLETE]	EBSCO eBook Subscription Academic Collection - Worldwide
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	Microlithography.
Authority record control number or standard number	http://id.loc.gov/authorities/subjects/sh85084858
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	Microfabrication.
Authority record control number or standard number	http://id.loc.gov/authorities/subjects/sh96011316
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	TECHNOLOGY & ENGINEERING
General subdivision	Electronics
--	Circuits
--	General.
Source of heading or term	bisacsh
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	Microfabrication.
Source of heading or term	fast
Authority record control number or standard number	(OCoLC)fst01019807
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	Microlithography.
Source of heading or term	fast
Authority record control number or standard number	(OCoLC)fst01019883
655 #4 - INDEX TERM--GENRE/FORM
Genre/form data or focus term	Electronic books.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name	Hennessy, Theodore C.
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Relationship information	Print version:
Title	Lithography
Place, publisher, and date of publication	New York : Nova Science, c2011.
International Standard Book Number	9781617618376 (hardcover)
Record control number	(DLC) 2010033078
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE
Uniform title	Engineering tools, techniques and tables.
Authority record control number or standard number	http://id.loc.gov/authorities/names/no2011012899
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE
Uniform title	Nanotechnology science and technology series.
Authority record control number or standard number	http://id.loc.gov/authorities/names/no2009109464
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier	https://libproxy.firstcity.edu.my:8443/login?url=http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=367184
938 ## -
--	ProQuest Ebook Central
--	EBLB
--	EBL3018148
938 ## -
--	ebrary
--	EBRY
--	ebr10659070
938 ## -
--	EBSCOhost
--	EBSC
--	367184
938 ## -
--	YBP Library Services
--	YANK
--	6901989
994 ## -
--	92
--	MYFCU

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