Introduction to Microelectronic Fabrication
Jaeger, Richard C.
Introduction to Microelectronic Fabrication - Reading, Mass. : : Addison-Wesley Pub. Co., , c1988. - xiii, 232 p. : : ill. ; ; 24 cm. - Modular series on solid state devices ; ; v. 5. .
Includes bibliographical references and index.
9780201146950
Integrated circuits--Very large scale integration--Design and construction--Congresses.
TK7874.J33 1988
621.381/73 JAE 1988
Introduction to Microelectronic Fabrication - Reading, Mass. : : Addison-Wesley Pub. Co., , c1988. - xiii, 232 p. : : ill. ; ; 24 cm. - Modular series on solid state devices ; ; v. 5. .
Includes bibliographical references and index.
9780201146950
Integrated circuits--Very large scale integration--Design and construction--Congresses.
TK7874.J33 1988
621.381/73 JAE 1988