VLSI Fabrication Principles: Silicon and Gallium Arsenide.
Ghandhi, Sorab Khushro, 1928-
VLSI Fabrication Principles: Silicon and Gallium Arsenide. - New York : Wiley, c1983. - xi, 665 p. : ill. ; 24 cm.
"A Wiley-Interscience publication."
Includes bibliographical references and index.
0471868337 9780471868330
Integrated circuits--Very large scale integration.
Silicon.
Gallium arsenide.
TK7874.G473 1983
621.381/71 GHA 1983
VLSI Fabrication Principles: Silicon and Gallium Arsenide. - New York : Wiley, c1983. - xi, 665 p. : ill. ; 24 cm.
"A Wiley-Interscience publication."
Includes bibliographical references and index.
0471868337 9780471868330
Integrated circuits--Very large scale integration.
Silicon.
Gallium arsenide.
TK7874.G473 1983
621.381/71 GHA 1983