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Semiconductor manufacturing technology /

Quirk, Michael, 1953-

Semiconductor manufacturing technology / Michael Quirk, Julian Serda. - Upper Saddle River, NJ : Prentice Hall, 2001. - xiii, 666 p. : ill. ; 29 cm.

Includes bibliographical references (p. 647) and index.

"This book is written for students in two- and four-year technology programs at community colleges and universities. Chapters are organized around the broad technologies applicable to semiconductor manufacturing."--BOOK JACKET.

0130815209


Electronic industries.
Semiconductors--Design and construction.