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035 _a(WaSeSS)ssj0001737905
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050 0 0 _aTK7875
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210 1 0 _aMicrosyst Nanoeng
_2dnlm
222 0 _aMicrosystems & Nanoengineering
245 0 0 _aMicrosystems & nanoengineering
_h[electronic resource].
246 1 _aMicrosystems and nanoengineering
260 _a[London] :
_bNature Publishing Group
310 _aWeekly
362 1 _aBegan with (2015) 1, 15001.
500 _aElectronic resource type: Journal.
506 _aLicense restrictions may limit access.
588 _aDescription based on: (2015) 1, 15001; title from PDF caption (publisher's Web site, viewed Dec. 2, 2016).
588 _aLatest issue consulted: Volume 5, issue 1 (December 2019); (Nature.com website, viewed January 16, 2020).
650 0 _aMicroelectromechanical systems
_vPeriodicals.
650 0 _aNanotechnology
_vPeriodicals.
650 1 2 _aMicro-Electrical-Mechanical Systems.
650 2 2 _aNanotechnology.
650 7 _aMicroelectromechanical systems.
_2fast
_0(OCoLC)fst01019745
650 7 _aNanotechnology.
_2fast
_0(OCoLC)fst01032639
655 0 _aElectronic journals.
710 2 _aZhongguo ke xue yuan.
_bDian zi xue yan jiu suo.
856 4 0 _zFull text available from Engineering Database: 05/01/2015 to present
_uhttps://libproxy.firstcity.edu.my:8443/login?url=https://search.proquest.com/publication/2041946
999 _c23840
_d23840