000			01110nam a2200301 a 4500
001			vtls000003434
003			MY-PjKIC
005			20250102121008.0
008			100211t1993 000 0 eng d
020			_a9780201146950
035			_a0201146959
039		9	_a201006181044 _bfaridah7 _c201002111740 _dVLOAD _c201002111614 _dVLOAD _c201002111412 _dVLOAD
040			_cfcuc
050			_aTK7874.J33 1988
082			_a621.381/73 JAE 1988
090			_a621.38173 JAE 1988
100	1	0	_aJaeger, Richard C.
245	1	0	_aIntroduction to Microelectronic Fabrication _c.
260	0		_aReading, Mass. : _b: Addison-Wesley Pub. Co., _c, c1988.
300			_axiii, 232 p. : _b: ill. ; _c; 24 cm.
440		0	_aModular series on solid state devices ; _v; v. 5.
504			_aIncludes bibliographical references and index.
650		0	_aIntegrated circuits _xVery large scale integration _xDesign and construction _xCongresses.
942			_2ddc _c3
999			_c15049 _d15049