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| 090 | _a670 QUI | ||
| 100 | 1 |
_aQuirk, Michael, _d1953- |
|
| 245 | 1 | 0 |
_aSemiconductor manufacturing technology / _cMichael Quirk, Julian Serda. |
| 260 |
_aUpper Saddle River, NJ : _bPrentice Hall, _c2001. |
||
| 300 |
_axiii, 666 p. : _bill. ; _c29 cm. |
||
| 504 | _aIncludes bibliographical references (p. 647) and index. | ||
| 520 | 1 | _a"This book is written for students in two- and four-year technology programs at community colleges and universities. Chapters are organized around the broad technologies applicable to semiconductor manufacturing."--BOOK JACKET. | |
| 650 | 0 | _aElectronic industries. | |
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 700 | 1 | _aSerda, Julian. | |
| 999 |
_c12203 _d12203 |
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