TY  - BOOK
ED  - National Research Council (U.S.).
TI  - Beam technologies for integrated processing: report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council
SN  - 0585149453
AV  - TK7836 .N37 1992eb
U1  - 621.381 20
PY  - 1992///
CY  - Washington, D.C.
PB  - National Academy Press
KW  - Microelectronics industry
KW  - Molecular beams
KW  - Industrial applications
KW  - Microelectronics
KW  - Materials
KW  - Plasma-enhanced chemical vapor deposition
KW  - TECHNOLOGY & ENGINEERING
KW  - Electronics
KW  - bisacsh
KW  - Digital
KW  - fast
KW  - Molecular
KW  - Plasma-enhanced
KW  - Electronic book
KW  - Electronic books
N1  - "NMAB-461."; Includes bibliographical references; Electronic reproduction; [S.l.]; HathiTrust Digital Library; 2010
UR  - https://libproxy.firstcity.edu.my:8443/login?url=http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14749
ER  -