TY  - SER
ED  - Zhongguo ke xue yuan.
TI  - Microsystems & nanoengineering
SN  - 2055-7434
AV  - TK7875 
CY  - [London]
PB  - Nature Publishing Group
KW  - Microelectromechanical systems
KW  - Periodicals
KW  - Nanotechnology
KW  - Micro-Electrical-Mechanical Systems
KW  - fast
KW  - Electronic journals
N1  - Electronic resource type: Journal; License restrictions may limit access
UR  - https://libproxy.firstcity.edu.my:8443/login?url=https://search.proquest.com/publication/2041946
ER  -