TY  - BOOK
AU  - Ghandhi,Sorab Khushro
TI  - VLSI Fabrication Principles: Silicon and Gallium Arsenide
SN  - 0471868337
AV  - TK7874.G473 1983 
U1  - 621.381/71 GHA 1983 
PY  - 1983///
CY  - New York
PB  - Wiley
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Silicon
KW  - Gallium arsenide
N1  - "A Wiley-Interscience publication."; Includes bibliographical references and index
ER  -