Ghandhi, Sorab Khushro,  1928- <br/><br/>
VLSI Fabrication Principles: Silicon and Gallium Arsenide. 

 - New York :  Wiley,  c1983. 
 - xi, 665 p. :  ill. ;  24 cm. 
<br/><br/> "A Wiley-Interscience publication." 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0471868337 9780471868330 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration.<br/>Silicon.<br/>Gallium arsenide.
<br/><br/><label>LC Class. No.: </label>TK7874.G473 1983 
<br/><br/><label>Dewey Class. No.: </label>621.381/71 GHA 1983