TY  - BOOK
AU  - Quirk,Michael
AU  - Serda,Julian
TI  - Semiconductor manufacturing technology
SN  - 0130815209
PY  - 2001///
CY  - Upper Saddle River, NJ
PB  - Prentice Hall
KW  - Electronic industries
KW  - Semiconductors
KW  - Design and construction
N1  - Includes bibliographical references (p. 647) and index
N2  - "This book is written for students in two- and four-year technology programs at community colleges and universities. Chapters are organized around the broad technologies applicable to semiconductor manufacturing."--BOOK JACKET
ER  -