Quirk, Michael,  1953- <br/><br/>
Semiconductor manufacturing technology / 
Michael Quirk, Julian Serda. 
 - Upper Saddle River, NJ :  Prentice Hall,  2001. 
 - xiii, 666 p. :  ill. ;  29 cm. 
<br/><br/>Includes bibliographical references (p. 647) and index. 
<br/><br/> "This book is written for students in two- and four-year technology programs at community colleges and universities. Chapters are organized around the broad technologies applicable to semiconductor manufacturing."--BOOK JACKET. 
<br/><br/><label>ISBN: </label>0130815209 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic industries.<br/>Semiconductors--Design and construction.